Mass Flow Controller | TMFC500 Type

Mass Flow Controller | TMFC500 Type

High Precision 1%|Gas Mass Flow Controller|Corrosion Resistance Rating|Conforms to Semiconductor Specifications|One-Year Warranty|3-Year Warranty

Description

Mass Flow Controller | TMFC500 Type

Product performance

  • High accuracy at low flow
  • Quick response≦2.0 seconds
  • Wide pressure range (1000 PSIG)
  • No leakage
  • No temperature or pressure required
  • connection compatible
  • Highly stable movable sensor
  • Corrosion resistance value
  • excellent linearity
  • Excellent long-term stability
  • Modular design
  • Compact Flow Control System
  • With RS-485 function
  • Option Function: Interface and Separation Type
  • Digital Display Options: RS485 (default) / DeviceNet™

What is the principle of gas flow controller/flow controller?

gas mass flow controllers

MFC principle structure description

Thermal Mass Flow Meter / Mass Flow Meter English MFCis an accurate, easy-to-install, low pressure drop flowmeter. It is suitable for flow measurement and control of dry gas applications. can alsoby gas typeReference linkapplication toObtain a thermal mass flow meter. A mass flow meter observes the cooling effect on the transducer it heats as a function of airflow. The result achieves a high level of accuracy at low cost compared to other gas flow measurement devices.

temperature flow relationship

Mass Flow Formula

Mass Flow Meter Installation

Product Videos

benefit:

  • ·High accuracy
  • Wide flow range, including low flow
  • · Simple, durable construction
  • ·Easy to install and maintain
  • Flexible connection of flow meters for flow control
  • · Various process connections
  • ·Tuning ratio 100:1
  • Low pressure drop across the flow meter
  • ·Provide convenient signal output
Principle of Thermal Mass Flow Meter/Type of Mass Flow Meter

Thermal Mass Flow MeterUse the thermal properties of the fluid to measure the motion of the fluid in a pipe or tube. In a thermal energy flow meter, the measured heat is applied to the heater of the sensor. A certain amount of energy is lost during the flow, and as the flow increases, more energy is lost. The energy lost by the sensor depends on the thermal properties of the fluid and the sensor design. The thermocompressive properties of fluids can vary with temperature and pressure, although these changes are usually insignificant in most applications. Since thermal flow measurement does not depend on the temperature or pressure of the fluid, thermal energy flow meters can be used to estimate the mass flow of the fluid.

In other words, in most applications, the properties of a fluid may depend on its composition. For these applications, different compositions of the fluid may interfere with the heat flow size during actual operation. Therefore, forThermal Mass Flow MeterIt is important for the provider to understand the composition of the fluid so that the appropriate normalization factors can be processed to accurately determine the flow rate. Due to this limitation,Thermal Mass Flow MeterUsually used to measure the flow of pure gas. Manufacturers can provide appropriate standardized information for other gas combinations, butThermal Mass Flow MeterThe accuracy of the depends on whether the actual gas mixture is the same as the gas mixture used for normalization purposes.

Additional information

Application

Factory

Types of

Electronic

Installation method

Thread

Output method

digital, analog

Technical Specifications

model TMFC500V TMFC500VD TMFC500A TMFC500AD
Flow range (nitrogen) 300~1000SLM 300~1000SLM 300~1000SLM 300~1000SLM
reaction speed ≦2.0sec
precision ±1.0 % FS
Repeat accuracy ±0.25 % FS
Pressure resistance 1500 PSIG
leak rate 1 x 10-9 atm.cc/sec or less
operating temperature 0~50℃
Main body SUS316
Accessories material Body Gasket Vition™ (Option Bura™ or Kalrez™ or Teflon™)
Standard: 1/2″ compression
Connection method Optional: 1/4″ Compression or VCR™, 3/8″ Compression or VCR™
electrical wiring Dsub 15-pin male connector single outlet
Traffic signal input 0~5Vdc 0~5Vdc+RS-485 4~20mA 4~20mA+RS-485
Flow signal output 0~5Vdc 0~5Vdc+RS-485 4~20mA 4~20mA+RS-485
Supply voltage +15~28Vdc/350mA
Applicable type ◎Support without ◎Support without
Dashboard Type Optional: Integrated type or separate type (interface cable 1m or 3m) only for TMFC500V/A application
Optional display panel show communication interface Digital Communication: RS485 (default) / DeviceNet™ only for TMFC500V/A application
Supply voltage AC110~240 V only for TMFC500V/A application

 

Application field

What is MFC

A mass flow controller (MFC) is a device used to measure and control the flow of gas. [1] Mass flow controllers are designed and calibrated to control a specific type of liquid or gas within a specific flow rate range. The MFC can be set from 0% to 100% of its full scale range, but typically operates within the range of 10% to 90% of full scale for best accuracy. The device will then control the flow rate to the given setpoint. MFCs can be either analog or digital. Digital flow controllers are often capable of controlling more than one type of fluid, while analog controllers are limited to the fluid for which they are calibrated.

All mass flow controllers have an inlet, an outlet, a mass flow sensor and a proportional control valve. The MFC houses a closed loop control system to which the operator (or external circuit/computer) provides an input signal which compares it to the value of the mass flow sensor and adjusts the proportional valve accordingly to achieve the desired flow. Flow is specified as a percentage of its calibrated full-scale flow and is provided to the MFC as a voltage signal.

Mass flow controllers require that the gas or liquid supplied must be within a specific pressure range. Low pressure can starve the MFC of liquid and prevent it from reaching the set point. High pressure can cause unstable flow.

MFC application

1. CVD equipment

What is CVD

Semi-Vapor Deposition (CVD) is a vacuum deposition method used to produce high-quality, high-performance solid materials. This process is commonly used in the semiconductor industry to produce thin films.

In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors that react and/or decompose on the surface of the substrate to produce the desired deposit. Volatile by-products are also typically produced, which are removed by the gas flow through the reaction chamber.

Microfabrication processes widely use CVD to deposit various forms of materials including: single crystal, polycrystalline, amorphous and epitaxy. These materials include: silicon (carbon dioxide, carbides, nitrides, oxynitrides), carbon (fibers, nanofibers, nanotubes, diamond and graphene), fluorocarbons, filaments, tungsten, titanium nitride and various high k dielectric.

2. Valve Box/Panel (VMB/VMP)

What is VMB/VMP

Through our experience in handling gases, we have gained the knowledge to design and manufacture panels (gas boxes) for EPI systems, MOCVD, material supply systems and more.
Among our business achievements, we are able to design and manufacture products that meet customer requirements (price and specifications). We can handle not only normal gas but also liquefied gas supply for hub rings. We also support various legal applications.

Flow range

model TMFC500V TMFC500VD TMFC500A TMFC500AD
Flow range (nitrogen) 300~1000SLM 300~1000SLM 300~1000SLM 300~1000SLM
reaction speed ≦2.0sec
precision ±1.0 % FS
Repeat accuracy ±0.25 % FS
Pressure resistance 1500 PSIG
leak rate 1 x 10-9 atm.cc/sec or less
operating temperature 0~50℃
Main body SUS316
Accessories material Body Gasket Vition™ (Option Bura™ or Kalrez™ or Teflon™)
Standard: 1/2″ compression
Connection method Optional: 1/4″ Compression or VCR™, 3/8″ Compression or VCR™
electrical wiring Dsub 15-pin male connector single outlet
Traffic signal input 0~5Vdc 0~5Vdc+RS-485 4~20mA 4~20mA+RS-485
Flow signal output 0~5Vdc 0~5Vdc+RS-485 4~20mA 4~20mA+RS-485
Supply voltage +15~28Vdc/350mA
Applicable type ◎Support without ◎Support without
Dashboard Type Optional: Integrated type or separate type (interface cable 1m or 3m) only for TMFC500V/A application
Optional display panel show communication interface Digital Communication: RS485 (default) / DeviceNet™ only for TMFC500V/A application
Supply voltage AC110~240 V only for TMFC500V/A application

Order model

Order model
TMFC coding Flow range
 

125 30~100SLM
300 100~300SLM
500 300~1000SLM
 

coding input/output signal
V 0~5Vdc (standard type)
A 4~20mA
VD 0~5Vdc+RS-485 (cannot be used with optional panel)
 

AD
4~20mA+RS-485 (cannot be used with optional panel)
coding Connection method
2 1/8″
4 1/4″
6 3/8″(Standard type: suitable for TMFC125/300)
8 1/2″(Standard type: suitable for TMFC500)
 

coding Connection type
A Compression SWL
V Male VCR
 

coding Body Gasket
V Viton (standard type)
B Buna
K Kalrez
T Teflon
coding Optional display panel function #1
N None (standard type)
I All-in-one
D Separate type with 1 meter cable
E Separate type with 3m cable
Code Optional display panel function #2
F Digital: Rs-485 (standard type)
C DeviceNet™
 

TMFC Complete order model
*Note: All series models use supply voltage (+15~28 Vdc/350mA)
*Note: The annual purchase order of the customized brand needs to be more than 100 sets
Inquiry form

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