High-grade Mass Flow Controller MODEL 3200 SERIES

High-grade Mass Flow Controller MODEL 3200 SERIES

Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard

Features

・Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response
・Use of a normally closed valve to ensure safety
・Reduced dead volume thanks to the diaphragm seat valve
・Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
・Low differential pressure type control available for combustiblegases (LP option)

Standard Specifications


!!Note !!
Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

Applications

Air sampling
Analyzer component
Bioreactor
Biotechnological process
Burn control
CCFL manufacturing
Chamber pressure control
Chemical process
Environment monitoring
Electronic device manufacturing
Food production
Fuel cell testing
Fermentation process
Gas blending
Gas distribution
Gas flow monitoring
Gas generation
Industrial furnace
Leak testing
Pharmaceutical process
Pollution monitoring
Process flow control
R&D
Solar power element manufacturing

What is Needle Valve application | Our performance

What is Magnetic Flowmeter application | Our performance

What is Thermal Mass Flowmeter application | Our performance

What is Vortex Steam Flowmeter application | Our performance

What is Ultrasonic Flowmeter application | Our performance

What is Paddle Wheel Flowmeter application | Our performance

What is Turbine Flowmeter application | Our performance

  • Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard

    Features

    ・Equipped with a temperature follow-up type current difference detection flow sensor (patent applied for) to ensure high accu-racy and high-speed response
    ・Use of a normally closed valve to ensure safety
    ・Reduced dead volume thanks to the diaphragm seat valve
    ・Control of small quantities of flows available up to 1 SCCM fullscale (SR option)
    ・Low differential pressure type control available for combustiblegases (LP option)

    Standard Specifications


    !!Note !!
    Specifications relating to the flow range (e.g., flow range, accuracy and re-sponse) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.

    Applications

    Air sampling
    Analyzer component
    Bioreactor
    Biotechnological process
    Burn control
    CCFL manufacturing
    Chamber pressure control
    Chemical process
    Environment monitoring
    Electronic device manufacturing
    Food production
    Fuel cell testing
    Fermentation process
    Gas blending
    Gas distribution
    Gas flow monitoring
    Gas generation
    Industrial furnace
    Leak testing
    Pharmaceutical process
    Pollution monitoring
    Process flow control
    R&D
    Solar power element manufacturing

    What is Needle Valve application | Our performance

    What is Magnetic Flowmeter application | Our performance

    What is Thermal Mass Flowmeter application | Our performance

    What is Vortex Steam Flowmeter application | Our performance

    What is Ultrasonic Flowmeter application | Our performance

    What is Paddle Wheel Flowmeter application | Our performance

    What is Turbine Flowmeter application | Our performance