Standard mass flow controller MODEL 3660 series

Developed with compactness and low cost in mind, the Model 3660 Series mass flow controllers are well-received by a wide range of users in a variety of applications, ranging from laboratory research and development activities to use as a variety of analyzers and vacuum units in standard mass flow production lines control model. Various derived models and options are available.

Description

feature

・Equipped with an advanced flow sensor with constant flow and deviation temperature detection to ensure high-speed response
・Using normally closed valve to ensure safety
・Ensure high reliability using electromagnetic actuators
・Low differential pressure control gas for combustibles (LP option)

Standard Specifications

! ! Remark! !
Specifications related to flow range (eg, flow range, accuracy, and response) are expressed in N2 or air equivalent. The product will be built with a primary pressure of 300 kPa or less and the secondary side open to atmosphere. Please contact us for details on pressure requirements.

Application

 Air sampling
Analyzer component

biotechnology process
 Combustion control
CCFL manufacturing
 Chamber pressure control
Chemical process
Environmental monitoring
 Electronic device manufacturing
 Food production
 Fuel cell testing
Fermentation process
 Gas mixing
Gas distribution
Airflow monitoring
 Gas generation
 Industrial furnace
Leak detection
Pharmaceutical process
 Pollution monitoring
Process control
R&D
Solar cell manufacturing
 Secondary calibration reference
Semiconductor Process
Surface treatment process
 Thermal flame spraying
Film manufacturing
Vapor deposition