All-Metal Digital Mass Flow Controller DF-550C SERIES

All-Metal Digital Mass Flow Controller DF-550C SERIES

DF-550C is now released as an all-metal model of the
high-performance digital mass flow controller DF-250C
Series.
The metal sealed structure enables controlling the measurement
of corrosive gases such as semiconductor process
gases.

Features

・Response improved to 1 sec or faster in all flow rate ranges thanks to a new solenoid
・The stainless steel seal supports high-reactive gases.
・Lineup ranging from 10 SCCM to 10 SLM
・Two communication ports enabling daisy chaining
・RS-485 communication function installed as standard
・RoHS CE standard compliant

Standard Specifications

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