High Precision Mass Flow Controller Model 3200 Series

The 3200 Series Mass Flow Controllers are a new model designed as the successor to the 3910 Series

They are used in a wide variety of applications in semiconductor manufacturing, LCD, combustion equipment, analytical equipment, and biotechnology. Its high performance equals the new standard in mass flow controllers

Description

The 3200 Series Mass Flow Controllers are a new model designed as the successor to the 3910 Series

feature

・Equipped with a temperature tracking type current difference detection flow sensor (patent pending) to ensure high accuracy and high-speed response
・Using normally closed valve to ensure safety
・Reduce dead volume due to diaphragm seat valve
・Small flow control up to 1 SCCM full scale (SR option)
Can be used for low differential pressure control of combustible gas (LP option)

Standard Specifications

! ! Remark! !
Specifications related to flow range (eg, flow range, accuracy, and response) are expressed in N2 or air equivalent. The product will be built with a primary pressure of 300 kPa or less and the secondary side open to atmosphere. Please contact us for details on pressure requirements.

Application

air sampling
Analyzer Components
Bioreactor
biotechnology process
combustion control
Made by CCFL
Chamber pressure control
chemical process
Environmental monitoring
Electronic equipment manufacturing
food production
fuel cell testing
fermentation process
gas mix
Gas distribution
Airflow monitoring
gas generation
industrial furnace
leak test
pharmaceutical process
pollution monitoring
Process flow control
R&D
Solar Power Component Manufacturing