TMFM1500 Type:Mass Flow meter

TMFM1500 Type:Mass Flow meter

 

    • Highly Accuracy at Low Flow
    • Fast Response(1.0)
    • Connection compatible
    • High stable removable sensor
    • Corrosion resistance Value
    • Excellent Linearity
    • Excellent long term Stability
    • Modular design
    • Compact Flow Control System
     

    What is a thermal mass flow meter?


    Thermal mass flowmeter is an accurate, easy-to-install, low pressure drop type flowmeter. It is suitable for flow measurement and control of dry gas applications. Thermal mass flow meters are also available through the Gas Type Reference link application. The mass flow meter observes the cooling effect on the heated transducer as the air flow changes. Compared to other gas flow measurement equipment, the result is a high level of accuracy at a low cost.

    benefit:

    • High accuracy
    • Wide range of flows, including low flows
    • Simple and durable structure
    • Easy to install and maintain
    • Flexible connection of flow meters for flow control
    • Various process connections
    • Regulation ratio 100: 1
    • Low pressure drop on the flow meter
    • Provide convenient signal output

     

    Thermal mass flow meter principle

    Thermal mass flow meters use the thermal properties of a fluid to measure the motion of the fluid in a pipe or tube. In a thermal energy flow meter, the measured heat is applied to the heater of the sensor. A certain amount of energy is lost during the flow, and as the flow increases, more energy is lost. The energy lost by the sensor depends on the thermal characteristics of the fluid and the sensor design. The hot-pressing characteristics of a fluid may change with temperature and pressure, although these changes are usually irrelevant in most applications. Since heat flow measurement does not depend on the temperature or pressure of the fluid, a thermal energy flow meter can be used to estimate the mass flow of the fluid.

    In other words, in most applications, the nature of a fluid may depend on its composition. For these applications, different components of the fluid may interfere with the heat flow size during actual operation. Therefore, it is important for a thermal mass flow meter provider to understand the composition of the fluid so that the appropriate normalization factors can be processed to accurately determine the flow. Due to this limitation, thermal mass flow meters are often used to measure the flow of pure gases. Manufacturers can provide appropriate standardized information for other gas combinations, but the accuracy of a thermal mass flow meter depends on whether the actual gas mixture is the same as the gas mixture used for standardization purposes.

     
  • Model

    TMFM15F

    TMFM15N

    TMFM15B

    TMFM15S

    Flow Range(N2)

    1.0~1600Nm3/h

    1.0~1600Nm3/h

    1.0~1600Nm3/h

    1000~400000Nm3/h

    Response Time

    ≦1.0 sec

    Accuracy

    ±1.5 % FS

    Repeatabllity

    ±0.75 % FS

    Proof Pressure

    0.1~1.5 Mpa

    Leak rate

    1 x 10-9 atm.cc/sec or less

    Working temperature Range

    -20~65℃;<95%RH

    Materials of parts in contact w/gases

    Body:SUS316

    Connection Type

    Flange

    NPT

    BSPT

    Insertion

    Ball Valve

    Without

    With

    Wifi connections

    Zigbee Wifi modbus RS485

    Flow rate output signals

    0~5 Vdc;4~20mA,:Pulse;RS-485;RS-232

    APP Software

     Support:iOS/Andriod

    required power supply

    +8~24 Vdc


  • What is MFM

    mass flow meter, also known as an inertial flow meter is a device that measures mass flow rate of a fluid traveling through a tube. The mass flow rate is the mass of the fluid traveling past a fixed point per unit time.

    The mass flow meter does not measure the volume per unit time (e.g., cubic meters per second) passing through the device; it measures the mass per unit time (e.g., kilograms per second) flowing through the device. Volumetric flow rate is the mass flow rate divided by the fluid density. If the density is constant, then the relationship is simple. If the fluid has varying density, then the relationship is not simple. The density of the fluid may change with temperature, pressure, or composition, for example. The fluid may also be a combination of phases such as a fluid with entrained bubbles. Actual density can be determined due to dependency of sound velocity on the controlled liquid concentration.[1]

    MFM application

    1.Smart piping monitor

    The primary reason thermal mass flow meters are popular in industrial applications is the way they are designed and built. They feature no moving parts, nearly unobstructed straight through flow path, require no temperature or pressure corrections and retain accuracy over a wide range of flow rates. Straight pipe runs can be reduced by using dual-plate flow conditioning elements and installation is very simple with minimal pipe intrusions.

    However, in many applications, the thermal properties of the fluid can be dependent upon fluid composition. In such applications, varying composition of the fluid during actual operation can affect the thermal flow measurement. Therefore, it is important for the thermal flow meter supplier to know the composition of the fluid so that the proper calibration factor can be used to determine the flow rate accurately. Suppliers can provide appropriate calibration information for other gas mixtures, however the accuracy of the thermal flow meter is dependent on the actual gas mixture being the same as the gas mixture used for calibration purposes. In other words, the accuracy of a thermal flow meter calibrated for a given gas mixture will be degraded if the actual flowing gas has a different composition.[2]

    2.CVD machine

    What is CVD

    hemical vapor deposition (CVD) is a vacuum deposition method used to produce high quality, high-performance, solid materials. The process is often used in the semiconductor industry to produce thin films.

    In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

    Microfabrication processes widely use CVD to deposit materials in various forms, including: monocrystallinepolycrystallineamorphous, and epitaxial. These materials include: silicon (dioxidecarbidenitrideoxynitride), carbon (fibernanofibersnanotubesdiamond and graphene), fluorocarbonsfilamentstungstentitanium nitride and various high-k dielectrics.

     

    3.Valve manifold box/panel (VMB/VMP)

    What is VMB/VMP

    Through our experiences of handling gases, we have acquired the knowledge to design and manufacture gas panel (gas box) of EPI system and MOCVD, material supply system etc.
    Achievements in our business, we are able to design and manufacture to meet customer’s request (price and specification). We can handle the hub ring air supply of liquefied gases not just only normal gases. We also support with var-ous kind of legal application.

     

     

  • Model

    TMFM15F

    TMFM15N

    TMFM15B

    TMFM15S

    Flow Range(N2)

    1.0~1600Nm3/h

    1.0~1600Nm3/h

    1.0~1600Nm3/h

    1000~400000Nm3/h

    Response Time

    ≦1.0 sec

    Accuracy

    ±1.5 % FS

    Repeatabllity

    ±0.75 % FS

    Proof Pressure

    0.1~1.5 Mpa

    Leak rate

    1 x 10-9 atm.cc/sec or less

    Working temperature Range

    -20~65℃;<95%RH

    Materials of parts in contact w/gases

    Body:SUS316

    Connection Type

    Flange

    NPT

    BSPT

    Insertion

    Ball Valve

    Without

    With

    Wifi connections

    Zigbee Wifi modbus RS485

    Flow rate output signals

    0~5 Vdc;4~20mA,:Pulse;RS-485;RS-232

    APP Software

     Support:iOS/Andriod

    required power supply

    +8~24 Vdc

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