{"id":7214,"date":"2023-03-13T12:14:04","date_gmt":"2023-03-13T04:14:04","guid":{"rendered":"https:\/\/www.fgttw.com\/?post_type=product&#038;p=7214"},"modified":"2025-07-11T20:27:48","modified_gmt":"2025-07-11T12:27:48","slug":"kofloc-mass-flow-meter-8700","status":"publish","type":"product","link":"https:\/\/www.fgttw.com\/vi\/import-agent\/kofloc\/kofloc-flow-meter\/kofloc-mass-flow-meter-8700\/","title":{"rendered":"Lo\u1ea1i hi\u1ec3n th\u1ecb \u0110\u1ed3ng h\u1ed3 \u0111o l\u01b0u l\u01b0\u1ee3ng kh\u1ed1i\/b\u1ed9 \u0111i\u1ec1u khi\u1ec3n l\u01b0u l\u01b0\u1ee3ng kh\u1ed1i 8700 series | th\u01b0\u01a1ng hi\u1ec7u kofloc"},"content":{"rendered":"<h2>kofloc\u54c1\u724c\u986f\u793a\u578b\u8cea\u91cf\u6d41\u91cf\u8a08\/\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668 8700 \u7cfb\u5217<\/h2>\n<p>8700\u7cfb\u5217\u662f\u57fa\u65bc 8500 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\/>\n\u4f7f\u7528\u914d\u7ba1\u63a7\u5236\u6280\u8853\u7684\u6c23\u9ad4\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u3002\u9019\u4e9b\u7cfb\u5217\u812b\u7a4e\u800c\u51fa\uff0c\u56e0\u70ba\u5b83\u5011\u53ef\u4ee5\u6e2c\u91cf\u6c23\u9ad4\u6d41\u91cf\u548c\u63a7\u5236\u3002<br \/>\n\u53ea\u8981\u60a8\u7684\u8cea\u91cf\u6d41\u91cf\u9700\u8981\u986f\u793a\u4e26\u6d41\u91cf\u7bc4\u570d\u5f88\u5927\u6642\uff0c\u90a3\u9ebc\u4f7f\u7528 MEMS \u82af\u7247\u50b3\u611f\u5668\u6280\u8853\uff08\u4f8b\u5982TMFM6000\uff09\u7684\u6c23\u9ad4\u7cfb\u5217\u5c31\u662f\u5b8c\u7f8e\u7684\u9078\u64c7\u3002<br \/>\n\u4f7f\u7528\u5728\u7dda (CMOS) \u6280\u8853\u7684\u6c23\u9ad4\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u3002<\/p>\n<h3>\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668( MFC )\u539f\u7406\/\u6d41\u91cf\u63a7\u5236\u5668\u539f\u7406<\/h3>\n<p>\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668( MFC )\u662f\u4e00\u7a2e\u7528\u65bc\u6e2c\u91cf\u548c\u63a7\u5236\u6db2\u9ad4\u548c\u6c23\u9ad4\u6d41\u91cf\u7684\u8a2d\u5099\u3002[1]\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u7d93\u904e\u8a2d\u8a08\u548c\u6821\u6e96\uff0c\u53ef\u5728\u7279\u5b9a\u6d41\u91cf\u7bc4\u570d\u5167\u63a7\u5236\u7279\u5b9a\u985e\u578b\u7684\u6db2\u9ad4\u6216\u6c23\u9ad4\u3002MFC \u53ef\u4ee5\u5728\u5176\u6eff\u91cf\u7a0b\u7bc4\u570d\u7684 0% \u5230 100% \u4e4b\u9593\u8a2d\u5b9a\u4e00\u500b\u8a2d\u5b9a\u9ede\uff0c\u4f46\u901a\u5e38\u5728\u6eff\u91cf\u7a0b\u7684 10% \u5230 90% \u7bc4\u570d\u5167\u904b\u884c\uff0c\u5f9e\u800c\u7372\u5f97\u6700\u4f73\u7cbe\u5ea6\u3002\u7136\u5f8c\uff0c\u8a72\u8a2d\u5099\u5c07\u63a7\u5236\u6d41\u901f\u81f3\u7d66\u5b9a\u7684\u8a2d\u5b9a\u503c\u3002MFC \u53ef\u4ee5\u662f\u6a21\u64ec\u7684\u6216\u6578\u5b57\u7684. \u6578\u5b57\u6d41\u91cf\u63a7\u5236\u5668\u901a\u5e38\u80fd\u5920\u63a7\u5236\u4e00\u7a2e\u4ee5\u4e0a\u7684\u6d41\u9ad4\uff0c\u800c\u6a21\u64ec\u63a7\u5236\u5668\u50c5\u9650\u65bc\u5176\u6821\u6e96\u7684\u6d41\u9ad4\u3002<\/p>\n<p>\u6240\u6709\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u90fd\u6709\u4e00\u500b\u5165\u53e3\u7aef\u53e3\u3001\u4e00\u500b\u51fa\u53e3\u7aef\u53e3\u3001\u4e00\u500b\u8cea\u91cf\u6d41\u91cf\u50b3\u611f\u5668\u548c\u4e00\u500b\u6bd4\u4f8b\u63a7\u5236\u95a5\u3002MFC \u914d\u5099\u4e86\u4e00\u500b\u9589\u74b0\u63a7\u5236\u7cfb\u7d71\uff0c\u8a72\u7cfb\u7d71\u7531\u64cd\u4f5c\u54e1\uff08\u6216\u5916\u90e8\u96fb\u8def\/\u8a08\u7b97\u6a5f\uff09\u63d0\u4f9b\u4e00\u500b\u8f38\u5165\u4fe1\u865f\uff0c\u8a72\u4fe1\u865f\u8207\u8cea\u91cf\u6d41\u91cf\u50b3\u611f\u5668\u7684\u503c\u9032\u884c\u6bd4\u8f03\uff0c\u4e26\u76f8\u61c9\u5730\u8abf\u6574\u6bd4\u4f8b\u95a5\u4ee5\u9054\u5230\u6240\u9700\u7684\u6d41\u91cf\u3002\u6d41\u91cf\u6307\u5b9a\u70ba\u5176\u6821\u6e96\u6eff\u91cf\u7a0b\u6d41\u91cf\u7684\u767e\u5206\u6bd4\uff0c\u4e26\u4f5c\u70ba\u96fb\u58d3\u4fe1\u865f\u63d0\u4f9b\u7d66 MFC\u3002<\/p>\n<p>\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u8981\u6c42\u4f9b\u61c9\u6c23\u9ad4\u6216\u6db2\u9ad4\u8655\u65bc\u7279\u5b9a\u58d3\u529b\u7bc4\u570d\u5167\u3002\u4f4e\u58d3\u5c07\u4f7f MFC \u7684\u6d41\u9ad4\u8017\u76e1\u4e26\u5c0e\u81f4\u5176\u7121\u6cd5\u9054\u5230\u5176\u8a2d\u5b9a\u9ede\u3002\u9ad8\u58d3\u53ef\u80fd\u5c0e\u81f4\u6d41\u901f\u4e0d\u7a69\u5b9a\u3002\u6709\u8a31\u591a\u4e0d\u540c\u7684\u6280\u8853\u53ef\u4ee5\u5e6b\u52a9\u6e2c\u91cf\u6d41\u9ad4\u7684\u6d41\u91cf\u4e26\u6700\u7d42\u5e6b\u52a9\u63a7\u5236\u6d41\u91cf\u3002\u9019\u4e9b\u6280\u8853\u5b9a\u7fa9\u4e86\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\u7684\u985e\u578b\uff0c\u5b83\u5011\u5305\u62ec\u58d3\u5dee(\u0394P)\u3001\u6eab\u5dee (\u0394T)\u3001\u79d1\u91cc\u5967\u5229\u529b\u3001\u8d85\u8072\u6ce2\u3001\u96fb\u78c1\u3001\u6e26\u8f2a\u7b49\u3002<\/p>\n<figure style=\"width: 440px\" class=\"wp-caption alignnone\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium\" src=\"https:\/\/upload.wikimedia.org\/wikipedia\/commons\/thumb\/e\/e2\/MFC_en.svg\/440px-MFC_en.svg.png\" alt=\"mass flow controller,\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668\" width=\"440\" height=\"293\" title=\"\"><figcaption class=\"wp-caption-text\">mass flow controller,\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668,mfc\u539f\u7406\u7d50\u69cb\u8aaa\u660e<\/figcaption><\/figure>\n<h3>\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd<\/h3>\n<p>\u73fe\u5728\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u61c9\u7528\u5834\u5408\u8d8a\u4f86\u8d8a\u591a\uff0c\u800c\u4e00\u4e9b\u521d\u6b21\u5b89\u88dd\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u5834\u5408\u56e0\u70ba\u4e0d\u6e05\u695a\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u5b89\u88dd\u65b9\u5f0f\uff0c\u88dd\u53cd\u3001\u88dd\u932f\u7b49\u73fe\u8c61\uff0c\u5f71\u97ff\u8a2d\u5099\u7684\u6b63\u5e38\u4f7f\u7528\uff0c\u672c\u6587\u5c31\u9019\u7a2e\u554f\u984c\u8a73\u7d30\u4ecb\u7d39\u4e00\u4e0b\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u5b89\u88dd\u65b9\u5f0f\u3002<\/p>\n<p>\u5728\u50b3\u611f\u5668\u5b89\u88dd\u6642\u904e\u5927\u7684\u6a5f\u68b0\u61c9\u529b\u6703\u5f71\u97ff\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u96f6\u9ede\uff0c\u5982\u679c\u9019\u4e9b\u61c9\u529b\u662f\u4e0d\u65b7\u8b8a\u5316\u7684\uff0c\u5100\u8868\u5c07\u51fa\u73fe\u96f6\u9ede\u6f02\u79fb\u9032\u800c\u5c0e\u81f4\u5100\u8868\u6e2c\u91cf\u4e0d\u6e96\uff0c\u7121\u6cd5\u6b63\u5e38\u5de5\u4f5c\u3002\u56e0\u6b64\u8cea\u91cf\u6d41\u91cf\u8a08\u7684\u6b63\u78ba\u5b89\u88dd\uff0c\u662f\u4fdd\u8b49\u8a2d\u5099\u6b63\u5e38\u904b\u884c\u7684\u91cd\u8981\u4e00\u74b0\u3002<\/p>\n<p>\u4e00\uff0c\u5b89\u88dd\u65b9\u5f0f\u9078\u64c7<\/p>\n<p>\u50b3\u611f\u5668\u7684\u5b89\u88dd\u65b9\u5f0f\u4e3b\u8981\u6839\u64da\u6d41\u9ad4\u7684\u76f8\u5225\u53ca\u5176\u5de5\u85dd\u60c5\u6cc1\u78ba\u5b9a\uff0c\u6709\u4e09\u7a2e\u5b89\u88dd\u65b9\u5f0f\u3002<\/p>\n<p>1\u3001\u82e5\u88ab\u6e2c\u6d41\u9ad4\u662f\u6db2\u9ad4\uff0c\u4e00\u822c\u63a1\u7528\u5916\u6bbc\u671d\u4e0b\u5b89\u88dd\u50b3\u611f\u5668\uff0c\u907f\u514d\u7a7a\u6c23\u805a\u7a4d\u5728\u50b3\u611f\u5668\u632f\u52d5\u7ba1\u5167\uff0c\u5f9e\u800c\u9054\u5230\u6e96\u78ba\u6e2c\u91cf\u8cea\u91cf\u6d41\u91cf\u7684\u76ee\u7684\u3002<\/p>\n<p>2\u3001\u5982\u679c\u88ab\u6e2c\u6d41\u9ad4\u662f\u6c23\u9ad4\uff0c\u4e00\u822c\u63a1\u7528\u5916\u6bbc\u671d\u4e0a\u5b89\u88dd\u50b3\u611f\u5668\uff0c\u907f\u514d\u51b7\u51dd\u6db2\u805a\u7a4d\u5728\u50b3\u611f\u5668\u632f\u52d5\u7ba1\u5167\u3002<\/p>\n<p>3\u3001\u5982\u679c\u88ab\u6e2c\u6d41\u9ad4\u662f\u6db2\u56fa\u9ad4\u7684\u6df7\u5408\u6f3f\u6db2\u6642\uff0c\u5c07\u50b3\u611f\u5668\u5b89\u88dd\u5728\u5782\u76f4\u5b98\u9053\u4e0a\uff0c\u9019\u53ef\u907f\u514d\u5fae\u7c92\u805a\u7a4d\u5728\u50b3\u611f\u5668\u79d1\u6c0f\u529b\u6e2c\u91cf\u7ba1\u5167\u3002\u6b64\u5916\uff0c\u5982\u679c\u5de5\u85dd\u7ba1\u7dda\u9700\u8981\u7528\u6c23\u9ad4\u548c\u84b8\u6c7d\u6e05\u6383\uff0c\u9019\u7a2e\u5b89\u88dd\u65b9\u5f0f\u9084\u53ef\u4ee5\u4fbf\u65bc\u6e05\u6383\uff0c\u4f46\u9019\u7a2e\u5b89\u88dd\u65b9\u5f0f\u8f03\u524d\u5169\u7a2e\u96e3\u65bc\u56fa\u5b9a\uff0c\u4e14\u58d3\u640d\u8f03\u5927\u3002<\/p>\n<figure id=\"attachment_6867\" aria-describedby=\"caption-attachment-6867\" style=\"width: 300px\" class=\"wp-caption alignleft\"><a href=\"https:\/\/www.fgttw.com\/?attachment_id=6867\" rel=\"attachment wp-att-6867\"><img decoding=\"async\" class=\"size-medium wp-image-6867\" src=\"https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f-300x150.png\" alt=\"\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f\" width=\"300\" height=\"150\" title=\"\" srcset=\"https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f-300x150.png 300w, https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f-600x300.png 600w, https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f-64x32.png 64w, https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f-18x9.png 18w, https:\/\/www.fgttw.com\/wp-content\/uploads\/2023\/02\/\u8cea\u91cf\u6d41\u91cf\u8a08\u5b89\u88dd\u65b9\u5f0f.png 650w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/a><figcaption id=\"caption-attachment-6867\" class=\"wp-caption-text\">\u8cea\u91cf\u6d41\u91cf\u8a08\u6982\u5ff5\u5b89\u88dd<\/figcaption><\/figure>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<p>&nbsp;<\/p>\n<h5>\u6c23\u9ad4\u6d41\u91cf\u63a7\u5236\u5668<\/h5>\n<p>\u6c23\u9ad4\u8cea\u91cf\u6d41\u91cf\u63a7\u5236\u5668 gas mass flow controllers<\/p>\n<p>\u8cea\u91cf\u6d41\u91cf\u516c\u5f0f<\/p>\n<h4>\u8cea\u91cf\u6d41\u91cf\u8a08\u7a2e\u985e<\/h4>\n<h4>\u8cea\u91cf\u6d41\u91cf\u8a08\u82f1\u6587<\/h4>\n<p>\u6309<strong><a href=\"https:\/\/www.3du.tw\/\" target=\"_blank\" rel=\"noopener\">\u4e09\u5ea6\u6f22\u8a9e\u7db2<\/a><\/strong>.\u591a\u7a2e\u89e3\u91cb mass flowmeter\u3010\u96fb\u5b50\u8a08\u7b97\u6a5f\u540d\u8a5e\u3011mass flow meter\u3010\u6a5f\u68b0\u5de5\u7a0b\u3011mass flowmeter sensor\u3010\u6d77\u6d0b\u79d1\u5b78\u540d\u8a5e-\u6c34\u4e0b\u5de5\u7a0b\u3011thermal mass flow\u3010\u96fb\u5b50\u5de5\u7a0b\u3011mass flow measurement\u3010\u96fb\u6a5f\u5de5\u7a0b\u3011<\/p>\n<p><a href=\"https:\/\/www.easyatm.com.tw\/wiki\/%E9%9B%BB%E7%A3%81%E6%B5%81%E9%87%8F%E8%A8%88\" target=\"_blank\" rel=\"noopener\">\u96fb\u78c1\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p><a href=\"https:\/\/www.easyatm.com.tw\/wiki\/%E8%B3%AA%E9%87%8F%E6%B5%81%E9%87%8F%E8%A8%88\" target=\"_blank\" rel=\"noopener\">\u8cea\u91cf\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p><a href=\"https:\/\/www.newton.com.tw\/wiki\/%E4%B8%80%E9%AB%94%E5%8C%96%E6%B8%A6%E8%A1%97%E6%B5%81%E9%87%8F%E8%A8%88\/3585212\" target=\"_blank\" rel=\"noopener\">\u6e26\u6d41\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p><a href=\"https:\/\/www.itsfun.com.tw\/%E8%B6%85%E9%9F%B3%E6%B3%A2%E6%B5%81%E9%87%8F%E8%A8%88\/wiki-7967685\" target=\"_blank\" rel=\"noopener\">\u8d85\u97f3\u6ce2\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p><a href=\"https:\/\/www.easyatm.com.tw\/wiki\/%E9%BD%92%E8%BC%AA%E6%B5%81%E9%87%8F%E8%A8%88\" target=\"_blank\" rel=\"noopener\">\u9f52\u8f2a\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p><a href=\"https:\/\/www.itsfun.com.tw\/%E8%BD%89%E5%AD%90%E6%B5%81%E9%87%8F%E8%A8%88\/wiki-0379056-0126926\" target=\"_blank\" rel=\"noopener\">\u6d6e\u5b50\u6d41\u91cf\u8a08\u7528\u9014?<\/a>\u00a0|\u00a0<a href=\"https:\/\/www.fgttw.com\/zh\/%E6%88%91%E5%80%91%E7%9A%84%E5%AF%A6%E7%B8%BE\">\u6211\u5011\u7684\u5be6\u7e3e<\/a><\/p>\n<p>&nbsp;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Nh\u00e0 s\u1ea3n xu\u1ea5t kofloc Nh\u1eadt B\u1ea3n tu\u00e2n th\u1ee7 ch\u1ee9ng nh\u1eadn SEMI v\u00e0 CE | D\u00f2ng 8700 l\u00e0 lo\u1ea1i m\u00e1y \u0111o l\u01b0u l\u01b0\u1ee3ng kh\u1ed1i\/b\u1ed9 \u0111i\u1ec1u khi\u1ec3n l\u01b0u l\u01b0\u1ee3ng kh\u1ed1i lo\u1ea1i hi\u1ec3n th\u1ecb \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n d\u1ef1a tr\u00ean d\u00f2ng 8500. C\u00e1c lo\u1ea1i kh\u00ed \u00e1p d\u1ee5ng: N2, Air, H2, He, Ar, O2, CO2, v.v. Ph\u1ea1m vi d\u00f2ng ch\u1ea3y: 10SCCM ~ 100SLM v\u1edbi m\u00e0n h\u00ecnh hi\u1ec3n th\u1ecb, d\u1ec5 v\u1eadn h\u00e0nh.\u30fbCh\u1ec9 b\u00e1o l\u01b0u l\u01b0\u1ee3ng t\u00edch l\u0169y theo th\u1eddi gian th\u1ef1c.\u30fbC\u00e0i \u0111\u1eb7t c\u1ea3nh b\u00e1o gi\u1edbi h\u1ea1n tr\u00ean ho\u1eb7c gi\u1edbi h\u1ea1n d\u01b0\u1edbi. Giao ti\u1ebfp RS485. 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