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Flow meter
TMFC30A mass flow controller
TMFM30A mass flow meter
• High accuracy, low flow
• Fast response (≦1.0)
• Wide pressure range (1300 psig) the following
• No leakage
• do not have the temperature or pressure
• Connect a compatible
• High stability of mobile sensor
• Corrosion resistance value
• Excellent linearity
• Excellent long-term stability
• Modular design
• Compact Flow Control Systems
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Model |
TMFC30V |
TMFC30A |
TMFC50V |
TMFC50A |
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FlowRange(N2) |
10sccm~30SLM |
10sccm~30SLM |
10scc~50SLM |
10scc~50SLM |
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Response Time |
≦1.0 sec |
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Accuracy |
±1.0 % FS |
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Repeatability |
±0.25 % FS |
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Proof Pressure |
1300 PSIG |
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Leak rate |
1 x 10-9 atm.cc/sec or less |
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Workingtemperature Range |
0~50℃ |
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Materials of parts in contact w/gases |
Body:SUS316 |
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Valve seat:Vition™(Option Bura™or Kalrez™or Teflon™) |
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Joint |
Standard:1/4 compression |
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Option: 1/8 compression,1/4 VCR™,3/8 Compression,VCR™ |
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Electrical connections |
Dsub 15-pin male connector per standards |
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Flow rate input signals |
0~5 Vdc |
4~20mA |
0~5 Vdc |
4~20mA |
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Flow rate output signals |
0~5 Vdc |
4~20mA |
0~5 Vdc |
4~20mA |
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required power supply |
＋15~28 Vdc/350mA |
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